This work studies the scheduling problem of a single-arm multicluster tool with a linear
topology and process-bound bottleneck individual tool. The objective is to find a one-wafer …

A treelike hybrid multi-cluster tool is composed of both single-arm and dual-arm cluster tools
with a treelike topology. Scheduling such a tool is challenging. For a hybrid treelike multi …

In a multi-cluster tool, there may be both single and dual-arm cluster tools. Such a multi-
cluster tool is called hybrid multi-cluster tool. To operate such a multi-cluster tool, one needs …

Complex multi-cluster tools have been extensively used in semiconductor manufacturing. It
is crucial to increase their productivity by their effective operation. With structural complexity …

In operating a multi-cluster tool, it needs to coordinate the activities of multiple robots. Thus,
it is very challenging to schedule it. This paper conducts a study on one-wafer cyclic …

This paper studies the challenging problem of scheduling single-arm multi-cluster tools with
wafer residency time constraints. They have a linear topology and their bottleneck tool is …

Due to the different behavior of single-arm and dual-arm cluster tools, it is challenging to
schedule a hybrid multi-cluster tool containing both of them. This paper aims to find an …

Because of wafer residency time constraints for cluster tools, it is very difficult to schedule
them. This paper addresses their scheduling issues and conducts their schedulability and …

Semiconductor cluster tools are the integrated equipment to process a variety of silicon
wafers for the fabrication of microelectronic components. The cluster tool system consists of …

In this paper, we analyze optimal scheduling of a tree-like multicluster tool with single-blade
robots and constant robot moving times. We present a recursive minimal cycle time …