With wafer residency time constraint of cluster tools in semiconductor manufacturing, activity
time variation can make an originally feasible schedule infeasible. Thus, it is difficult to …

It is very challenging to schedule cluster tools subject to wafer residency time constraints
and activity time variation. This work develops a Petri net model to describe the system and …

Because of wafer residency time constraints for cluster tools, it is very difficult to schedule
them. This paper addresses their scheduling issues and conducts their schedulability and …

This paper studies the challenging problem of scheduling single-arm multi-cluster tools with
wafer residency time constraints. They have a linear topology and their bottleneck tool is …

When scheduling cluster tools under wafer residency time constraints, wafer sojourn time in
a processing module should be carefully controlled such that it is in a permissive range …

Because of residency time constraints and activity time variation of cluster tools, it is very
difficult to operate such integrated semiconductor manufacturing equipment. This paper …

With wafer residency time constraints, it is crucial to schedule a cluster tool in semiconductor
fabrication such that the wafer sojourn time in a processing module is in a given range …

With wafer residency time constraints for some wafer fabrication processes, such as low
pressure chemical-vapor deposition, the schedulability and scheduling problems are still …

This paper addresses the scheduling problem of single-arm cluster tools with both wafer
residency time constraints and activity time variation in semiconductor manufacturing. Based …

Due to the trends of larger wafer diameters and smaller lot sizes, cluster tools need to switch
from processing one lot of wafers to another frequently. This leads to more transient periods …