In this paper, the structural design and experiment of MEMS resonators for accurately
measuring Young's modulus is described. To establish an accurate measurement technique …

Young's modulus of a single-crystal thin silicon film was estimated by a noncontact method.
The resonance frequencies of a microresonator fabricated using the film were measured by …

In this paper, we describe a way of finding the optimum resonator geometry required to
determine a reasonably accurate Young's modulus of submicron-thick Al films. The films with …

This letter presents a method to measure the Young's moduli of individual thin-film layers in
a commercial integrated circuit (IC) foundry process. The method is based on measuring the …

This paper describes a quantitative measurement method for Young's modulus of
nanometer-thick film materials by using a MEMS resonator array. The MEMS resonators …

In designing micro-scale vibrating sensors, the achievement of very high quality factor (Q)
resonators working in bending mode remains a major issue. Nevertheless even though a …

The Young's modulus of micromechanical silicon films is very different from bulk silicon
structures. It is very meaningful to test Young's modulus of micromechanical silicon films in …

This paper reports a simple technique to measure the anisotropy of the Young's modulus of
MEMS materials using coupled cantilevers. The technique is demonstrated in single-crystal …

We describe the design of ultra-high Q mechanical cantilever resonators, fabricated from
single-crystal silicon wafers. The mechanical resonance mode at f≈ 8.5 kHz achieves a …

A technique for non-destructively measuring the Young's modulus and internal stress in a
family of microengineered boron doped silicon resonators has been described and …