Factors limiting the measurement of residual stresses in thin films by nanoindentation

CM Lepienski, GM Pharr, YJ Park, TR Watkins, A Misra… - Thin Solid Films, 2004 - Elsevier
Experimental results and finite element simulations are presented to examine whether a
recently developed nanoindentation method for measuring residual stresses in bulk …

Nanoindentation: Measuring methods and applications

DA Lucca, K Herrmann, MJ Klopfstein - CIRP annals, 2010 - Elsevier
Nanoindentation has emerged as an important method for the evaluation of the mechanical
response of small material volumes and thin films to applied loading. Here, we present a …

Substrate effects on nanoindentation mechanical property measurement of soft films on hard substrates

TY Tsui, GM Pharr - Journal of Materials research, 1999 - cambridge.org
Substrate effects on the measurement of thin film mechanical properties by nanoindentation
methods have been studied experimentally using a model soft film on hard substrate system …

Alternative methods to extract the hardness and elastic modulus of thin films from nanoindentation load-displacement data

A Kumar, K Zeng - International Journal of Applied Mechanics, 2010 - World Scientific
This paper presents alternative analysis methodologies to extract the elastic modulus and
hardness of the ultra-thin films from nanoindentation load-displacement data, especially …

Numerical study on the measurement of thin film mechanical properties by means of nanoindentation

X Chen, JJ Vlassak - Journal of Materials Research, 2001 - cambridge.org
Nanoindentation is a technique commonly used for measuring thin film mechanical
properties such as hardness and stiffness. In this study, we used the finite element method to …

Determining mechanical properties of thin films from the loading curve of nanoindentation testing

M Zhao, Y Xiang, J Xu, N Ogasawara, N Chiba, X Chen - Thin Solid Films, 2008 - Elsevier
Nanoindentation has been widely used to evaluate material properties. In this study, we
propose a method that utilizes only the loading curves of an indentation test to extract the …

Direct measurement of residual contact area and volume during the nanoindentation of coated materials as an alternative method of calculating hardness

NX Randall - Philosophical Magazine A, 2002 - Taylor & Francis
The mechanical properties of thin films can be measured by a variety of different techniques,
with nanoindentation being one of the most recent developments in this growing field. By …

Nanomechanical properties of solid surfaces and thin films

AB Mann - … and Nanomechanics I: Measurement Techniques and …, 2011 - Springer
Instrumentation for the testing of mechanical properties on the submicron scale has
developed enormously in recent years. This has enabled the mechanical behavior of …

Nanomechanical properties of solid surfaces and thin films

B Bhushan, AB Mann - Nanotribology and Nanomechanics: An …, 2008 - Springer
Instrumentation for the testing of mechanical properties on the submicron scale has
developed enormously in recent years. This has enabled the mechanical behavior of …

Nanoindentation of soft films on hard substrates: Experiments and finite element simulations

GM Pharr, A Bolshakov, TY Tsui… - MRS Online Proceedings …, 1997 - cambridge.org
Experiments and finite element simulations have been performed to examine errors in the
measurement of hardness and elastic modulus caused by pile-up when soft films deposited …