Mikrosystemtechnik
U Mescheder - Auflage, Teubner, 2004 - Springer
Natiirlich gibt es noch viele andere Bereiche, die schon heute eine Aufnahme in ein
Lehrbuch iiber Mikrosystemtechnik verdient hatten. So sind im Uberlappungsbereich …
Lehrbuch iiber Mikrosystemtechnik verdient hatten. So sind im Uberlappungsbereich …
[图书][B] Microsystem technology
W Menz, J Mohr, O Paul - 2008 - books.google.com
Dieses Buch gibt einen umfassenden Überblick über die theoretischen und experimentellen
Grundlagen der Mikrosystemtechnik. Im Mittelpunkt steht der Systemgedanke, dh die …
Grundlagen der Mikrosystemtechnik. Im Mittelpunkt steht der Systemgedanke, dh die …
Micro and nano fabrication
HH Gatzen, V Saile, J Leuthold - Springer, Berlin, Heidelberg, 2015 - Springer
Microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) are
miniaturized devices, quite often with a transducer function, and with the smallest structural …
miniaturized devices, quite often with a transducer function, and with the smallest structural …
[图书][B] Praxiswissen Mikrosystemtechnik: Grundlagen-Technologien-Anwendungen
F Völklein, T Zetterer - 2006 - books.google.com
Die Mikrosystemtechnik gilt als eine der Schlüsseltechnologien des 21. Jahrhunderts.
Dieses Fachbuch trägt dem Bedarf an fundiertem Fachwissen Rechnung und gibt dem …
Dieses Fachbuch trägt dem Bedarf an fundiertem Fachwissen Rechnung und gibt dem …
[图书][B] MEMS and microsystems: design, manufacture, and nanoscale engineering
TR Hsu - 2008 - books.google.com
Technology/Engineering/Mechanical A bestselling MEMS text... now better than ever. An
engineering design approach to Microelectromechanical Systems, MEMS and Microsystems …
engineering design approach to Microelectromechanical Systems, MEMS and Microsystems …
[图书][B] Mems/Nems:(1) Handbook techniques and applications design methods,(2) Fabrication techniques,(3) manufacturing methods,(4) Sensors and actuators,(5) …
CT Leondes - 2007 - books.google.com
As miniaturization, batch fabrication, and integrated electronics rapidly enable the
development of a broad range of smart products, MEMs, MOEMS, and NEMS are creating …
development of a broad range of smart products, MEMs, MOEMS, and NEMS are creating …
[图书][B] Microsystem technology and microrobotics
S Fatikow, U Rembold - 2013 - books.google.com
Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical,
electronic, optical, and other components on a substrate to construct functional devices …
electronic, optical, and other components on a substrate to construct functional devices …
[图书][B] Microsystem design
SD Senturia - 2005 - books.google.com
It is a real pleasure to write the Foreword for this book, both because I have known and
respected its author for many years and because I expect this book's publication will mark an …
respected its author for many years and because I expect this book's publication will mark an …
Microsystems Technology (MST) and MEMS applications: an overview
J Elders, V Spiering, S Walsh - MRS Bulletin, 2001 - cambridge.org
Microelectromechanical systems (MEMS), microsystems technology (MST), and
micromachines are roughly synonymous terms applied in the United States, Europe, and …
micromachines are roughly synonymous terms applied in the United States, Europe, and …
Microelectro-mechanical systems: Technology and applications
Microelectromechanical systems, or MEMS, constitute a group of microdevices that are just
beginning to affect many areas of science and technology. In diverse fields including the …
beginning to affect many areas of science and technology. In diverse fields including the …