A bias power is usually applied in inductively coupled plasmas (ICP) to realize the separate
control of the plasma density and the ion energy. In this research, a two-dimensional …

In this work, a two-dimensional hybrid model, which consists of a bulk fluid module, a sheath
module and an ion Monte-Carlo module, is developed to investigate the modulation of ion …

A fluid model is employed to investigate the effect of radio frequency bias on the behavior of
an argon inductively coupled plasma (ICP). In particular, the effects of ICP source power …

A hybrid model, ie a global model coupled bidirectionally with a parallel Monte-Carlo
collision (MCC) sheath model, is developed to investigate an inductively coupled discharge …

In order to include the nonlocal characteristics of electrons and investigate the inductively
coupled plasma (ICP) resources more completely, we have developed a hybrid Monte Carlo …

A hybrid model, which consists of a fluid module, a sheath module and an ion Monte Carlo
module, is employed to investigate the dependence of ion energy and angular distributions …

The inflexion point of electron density and effective electron temperature curves versus radio-
frequency (RF) bias voltage is observed in the H mode of inductively coupled plasmas …

Enhancing plasma uniformity can be achieved by modifying coil and chamber structures in
radio frequency inductively coupled plasma (ICP) to meet the demand for large-area and …

The characteristics of axisymmetrical inductively-coupled argon plasmas with wafer biasing
are examined using the particle-in-cell Monte Carlo method. The simulation is performed on …

To study the effects of an axial magnetic field on the discharge characteristics of Ar
inductively coupled plasma, a set of discharge plasma generators was designed. The …