This paper emphasis on state-of-the-art of the earlier until the current trend and demand,
principles, design considerations, key performance and fabrication technology of RF MEMS …

Radio frequency (RF) microelectromechanical systems (MEMS) have been pursued for
more than a decade as a solution of high-performance on-chip fixed, tunable and …

A new type of RF MEMS switch for low voltage actuation, high broadband application and
high power capability is presented. Mechanical and electromagnetic simulations of this new …

This paper presents the design, analysis, modeling and simulation of a novel RF MEMS
series switches with low actuation voltage. A mechanical modeling is presented to describe …

An overview of the MEMS technology development and applications is given in this paper. A
special attention is paid to the RF MEMS switches. Both series and shunt MEMS switches …

Isolation and actuation voltages are important parameters in micro-electro-mechanical
switches. These parameters can be destroyed by the effect of creating bulge and erosion in …

Shunt capacitive radio-frequency microelectromechanical system (RF MEMS) switches were
fabricated on silicon substrate and characterized in the RF domain. Various switch …

The increasing demand for low loss, high Q devices for high frequency applications has led
to the development of MEMS components in the RF domain. RF MEMS has evolved over the …

In this brief a new low actuation voltage RF MEMS switch is presented which can be
integrated and controlled with available CMOS technologies. Despite the advantages in the …

This paper is designed to review the MEMS switch by considering key aspects on the basis
of mechanical structure, actuation methods, and types of contact and circuit configurations …