Formation of single nanopores with diameters of 20–50 nm in silicon nitride membranes using laser-assisted controlled breakdown

C Ying, J Houghtaling, OM Eggenberger, A Guha… - ACS …, 2018 - ACS Publications
Nanopores with diameters from 20 to 50 nm in silicon nitride (SiN x) windows are useful for
single-molecule studies of globular macromolecules. While controlled breakdown (CBD) is …

Photothermally assisted thinning of silicon nitride membranes for ultrathin asymmetric nanopores

H Yamazaki, R Hu, Q Zhao, M Wanunu - ACS nano, 2018 - ACS Publications
Sculpting solid-state materials at the nanoscale is an important step in the manufacturing of
numerous types of sensor devices, in particular solid-state nanopore sensors. Here we …

Automated, ultra‐fast laser‐drilling of nanometer scale pores and nanopore arrays in aqueous solutions

T Gilboa, E Zvuloni, A Zrehen… - Advanced Functional …, 2020 - Wiley Online Library
The ability to quickly and reliably fabricate nanoscale pore arrays in ultra‐thin membranes
such as silicon nitride (SixN) is extremely important for the growing field of nanopore …

Fast and deterministic fabrication of sub-5 nanometer solid-state pores by feedback-controlled laser processing

E Zvuloni, A Zrehen, T Gilboa, A Meller - ACS nano, 2021 - ACS Publications
Nanopores are single-molecule sensors capable of detecting and quantifying a broad range
of unlabeled biomolecules including DNA and proteins. Nanopores' generic sensing …

Fabrication of multiple nanopores in a SiNx membrane via controlled breakdown

Y Wang, C Ying, W Zhou, L de Vreede, Z Liu, J Tian - Scientific reports, 2018 - nature.com
This paper reports a controlled breakdown (CBD) method to fabricate multiple nanopores in
a silicon nitride (SiNx) membrane with control over both nanopore count and nanopore …

Ultrathin, High-Lifetime Silicon Nitride Membranes for Nanopore Sensing

S Dutt, BI Karawdeniya, YMNDY Bandara… - Analytical …, 2023 - ACS Publications
Thin membranes are highly sought-after for nanopore-based single-molecule sensing, and
fabrication of such membranes becomes challenging in the≲ 10 nm thickness regime where …

Thickness-dependent dielectric breakdown and nanopore creation on sub-10-nm-thick SiN membranes in solution

I Yanagi, K Fujisaki, H Hamamura… - Journal of Applied …, 2017 - pubs.aip.org
Recently, dielectric breakdown of solid-state membranes in solution has come to be known
as a powerful method for fabricating nanopore sensors. This method has enabled a stable …

In situ solid-state nanopore fabrication

JP Fried, JL Swett, BP Nadappuram, JA Mol… - Chemical Society …, 2021 - pubs.rsc.org
Nanopores in solid-state membranes are promising for a wide range of applications
including DNA sequencing, ultra-dilute analyte detection, protein analysis, and polymer data …

Fabrication of solid-state nanopores with single-nanometre precision

AJ Storm, JH Chen, XS Ling, HW Zandbergen… - Nature materials, 2003 - nature.com
Single nanometre-sized pores (nanopores) embedded in an insulating membrane are an
exciting new class of nanosensors for rapid electrical detection and characterization of …

Versatile ultrathin nanoporous silicon nitride membranes

I Vlassiouk, PY Apel, SN Dmitriev… - Proceedings of the …, 2009 - National Acad Sciences
Single-and multiple-nanopore membranes are both highly interesting for biosensing and
separation processes, as well as their ability to mimic biological membranes. The density of …