Surface and subsurface defects significantly impact on the performance of optical
components, especially on high-power laser optics, of which the damage threshold will be …

High-performance optics puts stringent requirements on the defect control of transparent
optical components (TOCs). In order to accurately and reliably detect the surface and …

Surface defect is a concerned aspect of surface integrity in ultra-precision machining. The
dark field microscopy method is efficient in detecting surface processing defects, and has …

The three-dimensional (3D) precision measurement of subsurface defects (SSDs) remains a
long-term, critical, and urgent challenge in advanced manufacturing technology. In this …

Metrology and inspection (MI) processes are established at critical points of the
semiconductor manufacturing process in order to maintain a certain yield and also provide …

Surface defects on precision optical elements must be carefully inspected since they impact
the normal operation of an optical system. It is a challenge to inspect defects of large …

Defect has become the bottleneck that limits the further increase of energy output in high-
power laser devices, accurate defect detection is important for defect evaluation and optical …

Damage inspection of the large aperture components is required for Large, high-power laser
systems. Dark-field imaging technology is used to enhance resolution of defects. Because …

The high-resolution detecting system based on machine vision for defects on large aperture
and super-smooth surface uses a novel ring telecentric lighting optical system detecting the …

Advances in the semiconductor industry have led the wafer inspection technology to the limit
of nanometer-scale defect detection, which is far beyond the diffraction limit. In this regime …