Compact multi-physics models for large-displacement multilayer cantilevers in RF MEMS circuits, antennas and sensors

JI Kim - 2008 - search.proquest.com
We demonstrate compact analytical multi-physics models that accurately predict the
deformed shape of a variety of multilayer cantilevers and the associated electrical …

An analytical capacitance model of temperature-sensitive, large-displacement multimorph cantilevers: numerical and experimental validation

S Scott, JI Kim, F Sadeghi… - Journal of …, 2011 - ieeexplore.ieee.org
This paper presents a new experimentally validated analytical capacitance macromodel for
microelectromechanical systems large-displacement cantilever beams. The presented …

[图书][B] Modeling of slender structures in microsystems

S Taschini, H Baltes - 2000 - research-collection.ethz.ch
This thesis reports the development of techniques for the accurate modeling of micro-electro-
tnechanical systems (MEMS), focusing on geometries with highaspect ratio. Typical MEMS …

A 3-D integral equation-based approach to the analysis of real-life MMICs application to microelectromechanical systems

M Farina, T Rozzi - IEEE Transactions on Microwave Theory …, 2001 - ieeexplore.ieee.org
In this paper, we introduce a three-dimensional method-of-moments approach, suitable for
the analysis of real-life monolithic circuits for microwave/millimeter waves. It shares the …

Modeling and simulation of microelectromechanical systems in multi-physics fields

MI Younis - 2004 - search.proquest.com
The first objective of this dissertation is to present hybrid numerical-analytical approaches
and reduced-order models to simulate microelectromechanical systems (MEMS) in multi …

High-fidelity modeling of MEMS resonators. part ii. coupled beam-substrate dynamics and validation

YH Park, KC Park - Journal of Microelectromechanical Systems, 2004 - ieeexplore.ieee.org
A computational multiphysics model of the coupled beam-substrate-electrostatic actuation
dynamics of MEMS resonators has been developed for the model-based prediction of Q …

MEMS system-level modeling and simulation in smart systems

G Schröpfer, G Lorenz, A Krust, B Vernay… - … Systems Integration and …, 2016 - Springer
MEMS are miniaturized sensors or actuators and are essential to enabling “smart systems”
to interact with their physical environment. These devices add the “ears,”“eyes,”“noses,” and …

[PDF][PDF] Numerical modeling of reconfigurable RF MEMS-based structures involving the combination of electrical and mechanical force

K Kawano, S Sahrani, T Mori… - The Applied …, 2006 - journals.riverpublishers.com
MEMS are minimized electromechanical devices and systems that are realized using
integrated micro fabrication methods. And the technology is growing rapidly in RF field …

[PDF][PDF] Compact MEMS-SPICE Modeling

HH Pham, A Nathan - Sensors and materials, 1998 - sensors.myu-group.co.jp
We present a technique using multivariate-dependent sources that enables synthesis of
simple and compact circuit models, and which is effective in handling mixed signal coupling …

A multiscale model derivation and simulation tool for mems arrays

B Yang, W Belkhir, M Lenczner… - 2013 14th International …, 2013 - ieeexplore.ieee.org
We introduce a framework for computer-aided derivation of multi-scale models dedicated to
arrays of microsystems. It relies on a combination of a asymptotic methods used in the field …