Substrate processing apparatus

YH Kim, YG Han, DY Kim, HS Jang, JH Lee - US Patent 11,001,925, 2021 - Google Patents
A substrate processing apparatus having improved uniformity and speed of reaction is
provided. A substrate processing apparatus includes a body portion comprising a discharge …
被引用次数：378 相关文章

Substrate processing apparatus

YH Kim, YG Han, DY Kim, HS Jang… - US Patent …, 2021 - freepatentsonline.com
A substrate processing apparatus having improved uniformity and speed of reaction is
provided. A substrate processing apparatus includes a body portion comprising a discharge …

Substrate processing apparatus

YH Kim, YG Han, DY Kim, HS JANG… - US Patent App. 15 …, 2018 - Google Patents
A substrate processing apparatus having improved uniformity and speed of reaction is
provided. A substrate processing apparatus includes a body portion comprising a discharge …

SUBSTRATE PROCESSING APPARATUS

YH Kim, YG Han, DY Kim, HS Jang… - US Patent App. 15 …, 2018 - freepatentsonline.com
A substrate processing apparatus having improved uniformity and speed of reaction is
provided. A substrate processing apparatus includes a body portion comprising a discharge …