The miniaturization and low power consumption characteristics of RF MEMS (Radio
Frequency Microelectromechanical System) switches provide new possibilities for the …

In this communication, we have designed, simulated, performance improved, fabricated and
characterized a shunt capacitive RF MEMS switch with perforated serpentine membrane …

Electrostatic microelectromechanical (MEMS) switches are the basic building blocks for
various radio-frequency (RF) transceivers. However, conventional cantilever-based designs …

This paper presents a shunt protection technique to improve the hot-switching reliability of
metal-contact radio-frequency microelectromechanical systems (RF-MEMS) switches. The …

Lamb wave modes with type I dispersion characteristics exhibit strong affinity toward multi
transverse modes behavior above resonance frequency (fr) in the AlN Lamb wave …

This letter presents a novel cantilever and electrode biasing design of a metal-contact radio
frequency microelectromechanical systems (RF-MEMS) switch to integrate multiple contact …

Microelectromechanical systems (MEMS) switches are attractive for many applications
including radio frequency and microwave systems, logic devices, acceleration sensing and …

Abstract Micro-electromechanical systems (MEMS)-based devices comprise suspended
structures. A sacrificial layer is required to realize these structures. Usually, metal and …

This paper presents a highly reliable direct-contact electrostatic RF MEMS switch. To
enhance the reliability, the contact structure of the switch is designed into a circular shape …

The performance consistency of an RF MEMS switch matrix is a crucial metric that directly
impacts its operational lifespan. An improved crossbar-based RF MEMS switch matrix …