A state of the art review on Radio Frequency Micro-Electromechanical Systems (RF MEMS)
capacitive switches is reported by considering two key aspects:(1) materials selection …

CMOS-MEMS-based vibro-impact devices that utilize impact-induced nonlinear dynamics
have been shown to yield unique and unprecedented functionalities with on-chip integration …

As natural frequencies become commensurate, internal (autoparametric) resonances
involving the corresponding modes may arise. This phenomenon has been recently …

This paper introduces the comprehensive design concepts, procedure, and post-process
flow of a robust manufacturing platform for complementary metal-oxide-semiconductor …

This paper demonstrates a 125-kHz micromechanical resoswitch-embedded zero quiescent
power OOK/FSK communication receiver based on a CMOS-MEMS fabrication platform for …

This work demonstrates a CMOS-MEMS resonant thermometer with a temperature
coefficient of frequency (TCF) as high as 59.2× compared to that of a regular resonator …

This paper presents a technique for suppressing specific resonance modes of
micromechanical resonators by mechanical means. In particular, attaching multiple …

This work demonstrates, for the first time, internal resonance with a ratio as high as 1: 6 in
micromechanical CC-beam resonators. Particularly, multiple-stepped beams, similar to that …

This letter characterizes the effect of surface conditions on the nonlinear responses of
micromechanical resonant switches (aka “resoswitches”). In particular, a CMOS-MEMS …

This work demonstrates, for the first time, frequency-to-pulse density modulation (PDM)
functionality in micromechanical resoswitches based on the period doubling bifurcation …