Plasma-Driven Sciences: Exploring Complex Interactions at Plasma Boundaries

K Ishikawa, K Koga, N Ohno - Plasma, 2024 - mdpi.com
Plasma-driven science is defined as the artificial control of physical plasma-driven
phenomena based on complex interactions between nonequilibrium open systems …

Sputtering deposition of dense and low-resistive amorphous In2O3: Sn films under ZONE-T conditions of Thornton's structural diagram

Y Wada, W Magdy, K Takeda, Y Mido… - Applied Physics …, 2024 - pubs.aip.org
We have fabricated smooth-surfaced amorphous In 2 O 3: Sn (a-ITO) films at a high
temperature of 550 C, far above the typical crystallization threshold of 150 C for ITO films …