S Miyazaki, A Mouraguchi, K Shiba - Thin Solid Films, 1997 - Elsevier
Hydrogenated polysilane films prepared from a SiH4 plasma were oxidized at room temperature and subsequently annealed at temperatures ranging from 800 to 1000° C. It is …
Y Ishikawa, N Shibata, S Fukatsu - Journal of crystal growth, 1997 - Elsevier
A new class of non-dispersive Si nanoparticle (SNP) system has been created on Si (1 0 0) wafers by low-energy oxygen co-implantation during Si MBE. Ordered, highly oriented Si …