Nickel film on (001) SiC: thermally induced reactions
A Bächli, MA Nicolet, L Baud, C Jaussaud… - Materials Science and …, 1998 - Elsevier
The reactions induced in a vacuum furnace (5× 10− 7 Torr) between an electron-beam-
evaporated Ni film a few hundred nm thick and a (001)-oriented (ie Si-face-oriented) single …
evaporated Ni film a few hundred nm thick and a (001)-oriented (ie Si-face-oriented) single …
Study of Ni-based ohmic contacts fabricated on n-6H-SiC polar faces
MG Rastegaeva, AN Andreev… - … Conference. CAS'98 …, 1998 - ieeexplore.ieee.org
Electrical characteristics and composition of interface region were studied for Ni-based
ohmic contacts prepared on the n-6H-SiC polar faces at the various annealing temperatures …
ohmic contacts prepared on the n-6H-SiC polar faces at the various annealing temperatures …