Influence of birefringence on the image formation of high-resolution projection optics
Y Unno - Applied Optics, 2000 - opg.optica.org
The influence of birefringence on high-resolution projection optics used for microlithography
is investigated theoretically. A formula for partially coherent imaging that is based on the …
is investigated theoretically. A formula for partially coherent imaging that is based on the …