Point-spread function for a rotationally symmetric birefringent lens
Y Unno - JOSA A, 2002 - opg.optica.org
Imaging properties of a birefringent lens, in which the fast (or the slow) axis is distributed in
the radial direction whereas magnitude of birefringence varies as a quadratic function of the …
the radial direction whereas magnitude of birefringence varies as a quadratic function of the …
Symmetrically coated pellicle beam splitters for dual quarter-wave retardation in reflection and transmission
RMA Azzam, FA Mahmoud - Applied optics, 2002 - opg.optica.org
A trilayer pellicle that consists of a high-index center layer that is symmetrically coated on
both sides by a low-index film can be designed to produce differential reflection and …
both sides by a low-index film can be designed to produce differential reflection and …
157-nm system test for high-NA lithographic lens systems
H Schreiber, PG Dewa, K Hanford… - Optical …, 2002 - spiedigitallibrary.org
The path to smaller semiconductor feature sizes demands that lens systems operate at
higher numerical apertures and shorter wavelengths. Materials available for operation at …
higher numerical apertures and shorter wavelengths. Materials available for operation at …
Analyses of imaging performance degradation caused by birefringence residual in lens materials
Y Unno, A Suzuki - Journal of Micro/Nanolithography, MEMS …, 2002 - spiedigitallibrary.org
Influences of stress birefringence residual in lens elements of high-resolution projection
optics are investigated based on a partially coherent imaging formula that has been …
optics are investigated based on a partially coherent imaging formula that has been …
Negligible polarization aberrations of antireflection-coated paraxial optical systems
MMK Howlader, RMA Azzam - Polarization Analysis and …, 2002 - spiedigitallibrary.org
PROCEEDINGS OF SPIE Page 1 PROCEEDINGS OF SPIE SPIEDigitalLibrary.org/conference-proceedings-of-spie
Negligible polarization aberrations of antireflection-coated paraxial optical systems Mostofa …
Negligible polarization aberrations of antireflection-coated paraxial optical systems Mostofa …