Emerging trends in surface metrology

PM Lonardo, DA Lucca, L De Chiffre - Cirp Annals, 2002 - Elsevier
Recent advancements and some emerging trends in the methods and instruments used for
surface and near surface characterisation are presented, considering the measurement of …

Understanding nanoindentation unloading curves

GM Pharr, A Bolshakov - Journal of materials research, 2002 - cambridge.org
Experiments have shown that nanoindentation unloading curves obtained with Berkovich
triangular pyramidal indenters are usually welldescribed by the power-law relation P= α (h …

Towards the understanding of mechanical properties of super-and ultrahard nanocomposites

S Veprek, AS Argon - Journal of Vacuum Science & Technology B …, 2002 - pubs.aip.org
This article presents an attempt to explain in a simple way, understandable to a broad
spectrum of readers, the unusual combination of the mechanical properties of the recently …

Residual stresses in DLC/Si and Au/Si systems: Application of a stress-relaxation model to the nanoindentation technique

YH Lee, D Kwon - Journal of materials research, 2002 - cambridge.org
Residual stress in a thin film was analyzed by the nanoindentation technique. Two dominant
effects of residual stress to indentation were summarized as the slope change in loading …

Structure and properties of Si incorporated tetrahedral amorphous carbon films prepared by hybrid filtered vacuum arc process

CS Lee, KR Lee, KY Eun, KH Yoon, JH Han - Diamond and Related …, 2002 - Elsevier
The mechanical properties and atomic bond structure of Si incorporated into tetrahedral
amorphous carbon (ta-C) films were investigated. The films were deposited by a filtered …

A new in situ residual stress measurement method for a MEMS thin fixed-fixed beam structure

S Chen, TV Baughn, ZJ Yao… - Journal of …, 2002 - ieeexplore.ieee.org
A new method is described to measure the in situ residual stress state in a thin fixed-fixed
beam structure used in microelectromechanical systems (MEMS). The methodology can be …

Application of nanoindentation technique for structural characterisation of weld materials

P Maier, A Richter, RG Faulkner, R Ries - Materials characterization, 2002 - Elsevier
Nanoindentation, a modern technique for investigation of mechanical properties of materials
using a modified scanning force microscope (SEM), has been employed to examine two …

Molecular dynamics simulation of high-speed nanoindentation

H Yu, JB Adams, LG Hector Jr - Modelling and Simulation in …, 2002 - iopscience.iop.org
A series of molecular dynamics simulations has been performed to study high-speed
nanoindentation of a hard pyramidal tip into Al substrates. The effects of several process …

Effect of carrier gas on the deposition of titanium carbo-nitride coatings by a novel organo-metallic plasma immersion ion processing technique

AM Peters, M Nastasi - Vacuum, 2002 - Elsevier
Using a novel organo-metallic chemical vapor deposition plasma immersion ion processing
technique, titanium carbo-nitride (Ti–C–N) coatings were deposited from an organo-metallic …

Evaluation of thin film residual stress through the theoretical analysis of nanoindentation curve

YH Lee, JI Jang, DI Kwon - Transactions of the Korean Society of …, 2002 - koreascience.kr
Residual stress is a dominant obstacle to efficient production and safe usage of device by
deteriorating the mechanical strength and failure properties. Therefore, we proposed a new …