Phase control in multiexposure spatial frequency multiplication
Y Zhao, CH Chang, RK Heilmann… - Journal of Vacuum …, 2007 - pubs.aip.org
Multiexposure spatial frequency multiplication is a technique that allows the spatial
frequency of grating patterns to be increased by integer factors 2, 3, 4,… by applying a …
frequency of grating patterns to be increased by integer factors 2, 3, 4,… by applying a …