Cantilever with control of vertical and lateral position of contact probe tip
N Belov, Z Rapp - US Patent App. 11/553,449, 2007 - Google Patents
An embodiment of a probe storage device in accord with the present invention can include
an actuator for controlling cross-track positioning of a contact probe tip extending from a …
an actuator for controlling cross-track positioning of a contact probe tip extending from a …
Cantilever with control of vertical and lateral position of contact probe tip
N Belov, ZN Rapp - US Patent App. 11/553,408, 2007 - Google Patents
An embodiment of a probe storage device in accordance with the present invention can
include an electrostatic actuator for controlling the z-position of a cantilever having a contact …
include an electrostatic actuator for controlling the z-position of a cantilever having a contact …