A technique for measuring dielectric tensors in anisotropic layered structures, such as thin
films of biaxial materials, is demonstrated. The ellipsometric data are collected in a quasi …

Polarized illumination is a viable technique for improving the image quality and process
latitude of hyper-NA lithography. On investigation of polarization effects, it is often assumed …

Although military studies of the last ten years have shown that visible polarimetry supplies
supplemental surveillance information, the polarimetric signatures of ground-based objects …

Biaxial ellipsometry is a technique that measures the dielectric tensor and thickness of a
biaxial substrate, single-layer thin film, or multi-layer structure. The dielectric tensor of a …