Photolithography system with liquid crystal display as active gray-tone mask for 3D structuring of photoresist
T Hayashi, T Shibata, T Kawashima, E Makino… - Sensors and actuators A …, 2008 - Elsevier
Layer manufacturing is generally utilized for the development of micro electromechanical
systems (MEMS) and micro total analysis systems (μTAS). However, the preparation of …
systems (MEMS) and micro total analysis systems (μTAS). However, the preparation of …
Step-and-scan maskless lithography for ultra large scale DNA chips
OD Negrete, F Cerrina - Microelectronic engineering, 2008 - Elsevier
A maskless photolithography test bed was constructed to examine the requirements for
stepper-based synthesis of Ultra Large Scale DNA chips (ULS-DNA chips). The test bed is …
stepper-based synthesis of Ultra Large Scale DNA chips (ULS-DNA chips). The test bed is …
Phototraceur UV à micro-miroirs pour la réalisation de fonctions optiques integrées et diffractives
E Bialic, M Kessels, I Hardy, P Grosso… - … Journées Nationales d' …, 2008 - hal.science
Le sujet concerne la réalisation d'un phototraceur utilisant un écran à micro-miroirs (DMD:
Digital Micro-mirror Device) fonctionnant dans l'UV entre 300 et 400 nm. Ce phototraceur …
Digital Micro-mirror Device) fonctionnant dans l'UV entre 300 et 400 nm. Ce phototraceur …