The authors report a highly flexible process for nanostructure lithography to incorporate specific functions in micro-and nanomechanical devices. The unique step involves electron …
This paper presents for the first time a novel concept of a microelectromechanical systems (MEMS) waveguide switch based on a reconfigurable surface, whose working principle is to …
Various published work in recent years have established the feasibility of suspended graphene as nanoscale electromechanical devices, with much of these studies focusing on …