Integrated technology for partial air gap low K deposition
HJ Chang, CT Lee, YH Chou, SKJ Jian… - US Patent …, 2014 - Google Patents
(57) ABSTRACT A semiconductor device includes a semiconductor body and a low K
dielectric layer overlying the semiconductor body. A first portion of the low K dielectric layer …
dielectric layer overlying the semiconductor body. A first portion of the low K dielectric layer …