Millisecond-range liquid-phase processing of silicon-based hetero-nanostructures
S Prucnal, W Skorupa - … Annealing of Advanced Materials: Annealing by …, 2014 - Springer
The downscaling and stressor technology of Si based devices is extending the performance
of the silicon channel to its limits. Further downsizing of CMOS devices below 16 nm will …
of the silicon channel to its limits. Further downsizing of CMOS devices below 16 nm will …