Excimer laser use for microetching computer-generated holographic structures

Direct ArF excimer laser microfabrication methods for polymer photonics

M Vasileiadis, L Athanasekos… - 2014 16th …, 2014 - ieeexplore.ieee.org
Direct laser ablative microfabrication methods are exploited in the development of polymer
photonic structures. A dedicated experimental microfabrication facility using ArF excimer …
被引用次数：2 相关文章 所有 2 个版本