Dielectric barrier, etch stop, and metal capping materials for state of the art and beyond metal interconnects
SW King - ECS Journal of Solid State Science and Technology, 2014 - iopscience.iop.org
Over the past decade, the primary focus for improving the performance of nano-electronic
metal interconnect structures has been to reduce the impact of resistance-capacitance (RC) …
metal interconnect structures has been to reduce the impact of resistance-capacitance (RC) …