Polarization fields and wavefronts of two sheets for understanding polarization aberrations in optical imaging systems
J Sasián - Optical Engineering, 2014 - spiedigitallibrary.org
Polarization aberrations by highlighting the concepts of polarization aberration fields and of
wavefronts of two sheets are explained. The fields have a vector character and are derived …
wavefronts of two sheets are explained. The fields have a vector character and are derived …
A method for compensating the polarization aberration of projection optics in immersion lithography
Y Jia, Y Li, L Liu, C Han, X Liu - 7th International Symposium …, 2014 - spiedigitallibrary.org
As the numerical aperture (NA) of 193nm immersion lithography projection optics (PO)
increasing, polarization aberration (PA) leads to image quality degradation seriously. PA …
increasing, polarization aberration (PA) leads to image quality degradation seriously. PA …
Calibration Based on Theoretical Intensities and Spectral Sensitivity (Method I)
M Schlösser, M Schlösser - Accurate Calibration of Raman Systems: At the …, 2014 - Springer
Calibration Based on Theoretical Intensities and Spectral Sensitivity (Method I) | SpringerLink
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