X Zhang, Y Togano, K Hashimura… - Japanese Journal of …, 2015 - iopscience.iop.org
We investigate inductively coupled plasma (ICP) deep dry etching of Al 0.8 Ga 0.2 As for
photonic crystal (PC) fabrication using a Cl 2/BCl 3/CH 4 gas mixture. On the basis of our …