Methods for etching materials used in MRAM applications
J Kim, MM Ling, K Doan, CH Ching… - US Patent …, 2015 - Google Patents
BACKGROUND Magnetoresistive random access memory (MRAM) is a type of memory
device containing an array of MRAM cells that store data using their resistance values …
device containing an array of MRAM cells that store data using their resistance values …
Method of etching a magnesium oxide film
H Hatate, A Tsunoda, M Fukui, S Okame… - US Patent …, 2015 - Google Patents
(51) Int. Cl. Assistant Examiner—Sheikh Maruf HOIL 2L/00(2006.01)(74) Attorney, Agent, or
Firm—Oliff PLC HOIL 43/12(2006.01) GI IB5/39(2006.01)(57) ABSTRACT GOIR …
Firm—Oliff PLC HOIL 43/12(2006.01) GI IB5/39(2006.01)(57) ABSTRACT GOIR …