Graphene is the first engineering electronic material, which is purely two-dimensional: it
consists of two exposed sp 2-hybridized carbon surfaces and has no bulk. Therefore …

Pulsed rf plasmas exhibit many differences as compared to continuous wave plasmas with
the same average power levels, including large temporal variations in the electron …

The ion flux and ion velocity distribution function are studied using a capacitively coupled
radio frequency ion flux probe and a multigrid retarding field analyzer in an HBr/O 2 pulsed …

The electron energies and its distribution function are measured in non-equilibrium transient
pulsed microwave plasmas in the interpulse regime using a retarding field electron energy …

Ce travail de thèse aborde le problème de la gravure de matériaux ultraminces pour la
réalisation de nouvelles générations de transistors (FDSOI, FinFET) dans les dispositifs …