Modeling of the refractive index and composition of luminescent nanometric chlorinated-silicon nitride films with embedded Si-quantum dots
A Rodríguez-Gómez, L Escobar-Alarcón… - Journal of Applied …, 2016 - pubs.aip.org
The refractive index of nanometric (< 100 nm) chlorinated-silicon nitride films with
embedded silicon quantum dots, prepared by remote plasma enhanced chemical vapor …
embedded silicon quantum dots, prepared by remote plasma enhanced chemical vapor …
Combined study of the effect of deposition temperature and post-deposition annealing on the photoluminescence of silicon quantum dots embedded in chlorinated …
MA Serrano-Núñez, A Rodríguez-Gómez… - RSC …, 2016 - pubs.rsc.org
Chlorinated-silicon nitride (SiNx: Cl) thin films with embedded silicon quantum dots (Si-QDs)
were grown by remote plasma enhanced chemical vapor deposition using SiH2Cl2, H2 …
were grown by remote plasma enhanced chemical vapor deposition using SiH2Cl2, H2 …