Energy distribution and the flux of the ions coming on a surface are considered as the key-
parameters in anisotropic plasma etching. Since direct ion energy distribution (IED) …

The 2D numerical model of the ion current collection by a planar probe has been developed
on the basis of a particle in cell with the Monte Carlo collision method for ion motion. This …

Pulsed plasmas are promising candidates to go beyond limitations of continuous waves'
plasma. However, their interaction with surfaces remains poorly understood. The authors …

To improve probe methods of plasma diagnostics, special probe measurements were
performed and numerical models describing ion transport to a probe with allowance for …

Several issues associated with plasma etching of high aspect ratio structures originate from
the ions' bombardment of the sidewalls of the feature. The off normal angle incident ions are …

Для развития зондовых методов диагностики плазмы проведены экспериментальные
зондовые измерения и разработаны численные модели транспорта ионов на зонд с …