Plasma cleaning of ITER first mirrors
Nuclear fusion is an extremely attractive option for future generations to compete with the
strong increase in energy consumption. Proper control of the fusion plasma is mandatory to …
strong increase in energy consumption. Proper control of the fusion plasma is mandatory to …
Effects of a chirped bias voltage on ion energy distributions in inductively coupled plasma reactors
SJ Lanham, MJ Kushner - Journal of Applied Physics, 2017 - pubs.aip.org
The metrics for controlling reactive fluxes to wafers for microelectronics processing are
becoming more stringent as feature sizes continue to shrink. Recent strategies for controlling …
becoming more stringent as feature sizes continue to shrink. Recent strategies for controlling …