M Li, D Huang, M Li, W Zhang,
H Xu… - … on Electron Devices, 2019 - ieeexplore.ieee.org
Back-channel-etch (BCE) thin-film transistors (TFTs) with the stacked channel of sputtering
InZnO (IZO) and spray coating ZnSnO (ZTO) were fabricated. The spray-coated ZTO film …