Dry-etching processes for high-aspect-ratio features with sub-10 nm resolution high-χ block copolymers
G Pound-Lana, P Bézard, C Petit-Etienne… - … Applied Materials & …, 2021 - ACS Publications
Directed self-assembly of block copolymers (BCP) is a very attractive technique for the
realization of functional nanostructures at high resolution. In this work, we developed full dry …
realization of functional nanostructures at high resolution. In this work, we developed full dry …