[HTML][HTML] Low-voltage and high-reliability RF MEMS switch with combined electrothermal and electrostatic actuation
Y Zhu, J Pal - Micromachines, 2021 - mdpi.com
In this paper, we report a novel laterally actuated Radio Frequency (RF)
Microelectromechanical Systems (MEMS) switch, which is based on a combination of …
Microelectromechanical Systems (MEMS) switch, which is based on a combination of …
Novel Capacitive MEMS Logic Gates For Logic Circuits and Systems
H Samaali, MAB Hassena… - … & Test of Integrated Micro & …, 2021 - ieeexplore.ieee.org
A novel design based on capacitors dedicated to the low power logic circuits and systems is
presented in this work. This design is based on MEMS architectures and is intended to …
presented in this work. This design is based on MEMS architectures and is intended to …
[PDF][PDF] Low-Volt-age and High-Reliability RF MEMS Switch with Combined Electrothermal and Electrostatic Actuation. Micromachines 2021, 12, 1237
Y Zhu, J Pal - 2021 - academia.edu
In this paper, we report a novel laterally actuated Radio Frequency (RF)
Microelectromechanical Systems (MEMS) switch, which is based on a combination of …
Microelectromechanical Systems (MEMS) switch, which is based on a combination of …