[HTML][HTML] A comprehensive review of micro/nano precision glass molding molds and their fabrication methods

MA Asgar, J Kim, MR Haq, T Kim, S Kim - Micromachines, 2021 - mdpi.com
Micro/nano-precision glass molding (MNPGM) is an efficient approach for manufacturing
micro/nanostructured glass components with intricate geometry and a high-quality optical …

Three-dimensional nanolithography guided by DNA modular epitaxy

J Shen, W Sun, D Liu, T Schaus, P Yin - Nature Materials, 2021 - nature.com
Lithographic scaling of periodic three-dimensional patterns is critical for advancing scalable
nanomanufacturing. Current state-of-the-art quadruple patterning or extreme-ultraviolet …

Rigorous model-based mask data preparation algorithm applied to grayscale lithography for the patterning at the micrometer scale

P Chevalier, P Quéméré… - Journal of …, 2021 - ieeexplore.ieee.org
Grayscale mask creation has for the most part been restricted to over-simplified optical and
resist models usually based on a contrast curve approach. While this technique has proven …

Optimized ultraviolet grayscale process for high vertical resolution applied to spectral imagers

N Gerges, C Petit-Etienne, M Panabière… - Journal of Vacuum …, 2021 - pubs.aip.org
NanoCarb is a miniature Fourier transform imaging spectrometer dedicated to the
measurement of atmospheric CO 2 and CH 4. The key element of NanoCarb is an array of …

Etude d'une méthode de micro-fabrication 3D pour des applications microlentilles d'imageurs

P Chevalier - 2021 - theses.hal.science
Les capteurs d'images font désormais partie de notre quotidien à travers les smartphones et
autres appareils mobiles. La qualité croissante des images délivrées est liée au progrès …

Understanding the Effects of Multi-scale Surface Roughness on the Contact Properties of Hard-Material Interfaces

LA Thimons - 2021 - search.proquest.com
Adhesion between rough surfaces is an important property of interfaces and is one that has
far-reaching implications. Decades of experimental and theoretical work on the topic of …