J Shen, W Sun, D Liu, T Schaus, P Yin - Nature Materials, 2021 - nature.com
Lithographic scaling of periodic three-dimensional patterns is critical for advancing scalable nanomanufacturing. Current state-of-the-art quadruple patterning or extreme-ultraviolet …
P Chevalier, P Quéméré… - Journal of …, 2021 - ieeexplore.ieee.org
Grayscale mask creation has for the most part been restricted to over-simplified optical and resist models usually based on a contrast curve approach. While this technique has proven …
N Gerges, C Petit-Etienne, M Panabière… - Journal of Vacuum …, 2021 - pubs.aip.org
NanoCarb is a miniature Fourier transform imaging spectrometer dedicated to the measurement of atmospheric CO 2 and CH 4. The key element of NanoCarb is an array of …
Les capteurs d'images font désormais partie de notre quotidien à travers les smartphones et autres appareils mobiles. La qualité croissante des images délivrées est liée au progrès …
Adhesion between rough surfaces is an important property of interfaces and is one that has far-reaching implications. Decades of experimental and theoretical work on the topic of …