Spatio-temporal measurements of overshoot phenomenon in pulsed inductively coupled discharge
XY Lv, F Gao, QZ Zhang, YN Wang - Chinese Physics B, 2021 - iopscience.iop.org
Pulse inductively coupled plasma has been widely used in the microelectronics industry, but
the existence of overshoot phenomenon may affect the uniformity of plasma and generate …
the existence of overshoot phenomenon may affect the uniformity of plasma and generate …