Micro-fabrication and transfer of a detachable Ge epitaxial layer grown on porous germanium

V Daniel, J Chretien, G Hamon… - 2022 IEEE 49th …, 2022 - ieeexplore.ieee.org
Germanium (Ge) substrates are usually used for epitaxial growth of III-V materials but
represent a significant part of the cell total cost. The lift-off technique using porosification by …