Materials with the desirable surface wettability are of key importance in diverse applications.
However, most of the existing chemical processes used for surface wettability control are …

The spread of bacteria through contaminated surfaces is a major issue in healthcare, food
industry, and other economic sectors. The widespread use of antibiotics is not a sustainable …

This work investigates the physical, chemical, and mechanical properties of coir-coconut
husk powder reinforced low-density polyethylene composites exposed to an aggressive …

Low temperature plasmas (LTPs) are widely used in the semiconductor industry to etch,
deposit, modify, and pattern thin films during the fabrication of integrated circuits. Modeling …

This chapter begins with a brief overview of the plasma etching principle, equipment
categorization, and their applications. A total of 11 typical plasma etch techniques and …

Pulse modulation in inductively coupled plasmas (ICPs) has been proven as an effective
method not only to restrain the charging effect in etching trenches but also as a potential …

The pulsed inductively coupled plasma (ICP) has considerable potential to satisfy multiple
stringent scaling requirements for use in the semiconductor industry. However, overshoot of …

According to Moore's law, the semiconductor industry is experiencing certain challenges in
terms of adapting to highly sophisticated integrated technology. Therefore, controlling …

Abstract Machine learning (ML) was applied to optimize the etching profile for a line and
space pattern sample in plasma etching. To investigate the effect of different initial-learning …

In this work, the one-dimensional implicit particle-in-cell/Monte-Carlo collision code
(PIC/MCC) is used to study the discharge of a capacitively coupled plasma (CCP) under …