Optimal cyclic scheduling of wafer-residency-time-constrained dual-arm cluster tools by configuring processing modules and robot waiting time
J Wang, C Liu, MC Zhou, T Leng… - IEEE Transactions on …, 2023 - ieeexplore.ieee.org
Optimal cyclic scheduling problems of wafer-residency-time-constrained dual-arm cluster
tools in wafer fabrication are challenging and remain to be fully solved. Existing studies …
tools in wafer fabrication are challenging and remain to be fully solved. Existing studies …