Universal Deoxidation of Semiconductor Substrates Assisted by Machine Learning and Real-Time Feedback Control
C Shen, W Zhan, J Tang, Z Wu, B Xu… - … Applied Materials & …, 2024 - ACS Publications
Substrate oxidation is inevitable when exposed to ambient atmosphere during
semiconductor manufacturing, which is detrimental to the fabrication of state-of-the-art …
semiconductor manufacturing, which is detrimental to the fabrication of state-of-the-art …