Integration of SiCN as a low/spl kappa/etch stop and Cu passivation in a high performance...

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Driven-shield capacitive pressure sensor

E Pilant, D Schoonover, J Oreskovich… - US Patent …, 2024 - Google Patents
US11940336B2 - Driven-shield capacitive pressure sensor - Google Patents
US11940336B2 - Driven-shield capacitive pressure sensor - Google Patents Driven-shield …
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