Two-dimensional carrier profiling using scanning spreading resistance microscopy (SSRM) has recently been reported for Si- and InP-based structures. In this article, we report SSRM measurements solely on III–V material-based structures. We have studied GaAs and InP doping staircase structures, prepared using molecular-beam epitaxy. These structures were then used as calibration standards for the profiling of carrier density in state-of-the-art III–V-based optoelectronic devices. We discovered that SSRM data on GaAs can be obtained with either polarity; however, only one polarity (positive or negative sample bias for n- or respectively) produces SSRM results that show quantitative correlation with dopant concentration as determined by secondary ion mass spectrometry (SIMS). In comparison, SSRM measurements using both bias polarities on correlates well with SIMS, while exhibits a similar polarity dependence to p-type GaAs. A physical model based on a Schottky junction is proposed to explain these results. We also report calibrated SSRM measurements on GaAs and InP heterojunction bipolar transistor structures.
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July 2001
This content was originally published in
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
Papers from the 28th conference on the physics and chemistry of semiconductor interfaces
7-11 January 2001
Lake Buena Vista, Florida (USA)
Research Article| July 01 2001
Calibrated scanning spreading resistance microscopy profiling of carriers in III–V structures
R. P. Lu;
R. P. Lu
Department of Electrical and Computer Engineering, University of California, San Diego, La Jolla, California 92093-0407
Department of Physics, Simon Fraser University, Burnaby, British Columbia V5A 1S6, Canada
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K. L. Kavanagh;
K. L. Kavanagh
Department of Electrical and Computer Engineering, University of California, San Diego, La Jolla, California 92093-0407
Department of Physics, Simon Fraser University, Burnaby, British Columbia V5A 1S6, Canada
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St. J. Dixon-Warren;
St. J. Dixon-Warren
Nortel Networks, 3500 Carling Avenue, Ottawa, Ontario K2H 8E9, Canada
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A. Kuhl;
A. Kuhl
Nortel Networks, 3500 Carling Avenue, Ottawa, Ontario K2H 8E9, Canada
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A. J. SpringThorpe;
A. J. SpringThorpe
Nortel Networks, 3500 Carling Avenue, Ottawa, Ontario K2H 8E9, Canada
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E. Griswold;
E. Griswold
Nortel Networks, 3500 Carling Avenue, Ottawa, Ontario K2H 8E9, Canada
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G. Hillier;
G. Hillier
Nortel Networks, 3500 Carling Avenue, Ottawa, Ontario K2H 8E9, Canada
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I. Calder;
I. Calder
Nortel Networks, 3500 Carling Avenue, Ottawa, Ontario K2H 8E9, Canada
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R. Arés;
R. Arés
Nortel Networks, 3500 Carling Avenue, Ottawa, Ontario K2H 8E9, Canada
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R. Streater
R. Streater
Nortel Networks, 3500 Carling Avenue, Ottawa, Ontario K2H 8E9, Canada
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J. Vac. Sci. Technol. B 19, 1662–1670 (2001)
Article history
Received:
January 11 2001
Accepted:
June 05 2001
Citation
R. P. Lu, K. L. Kavanagh, St. J. Dixon-Warren, A. Kuhl, A. J. SpringThorpe, E. Griswold, G. Hillier, I. Calder, R. Arés, R. Streater; Calibrated scanning spreading resistance microscopy profiling of carriers in III–V structures. J. Vac. Sci. Technol. B 1 July 2001; 19 (4): 1662–1670. https://doi.org/10.1116/1.1387458
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