This paper develops an analytical model for the deflection of clamped–clamped multilayer
beams as a function of applied voltage by the energy method. The normalized displacement …

A novel model to study the pull-in behavior of nonlinear electromechanically coupled
systems has been developed. The proposed model is based on the multilayered cantilever …

Based on the first resonance frequency measurement of multilayer beams, a simple
extraction method has been developed to extract the Young's modulus of individual layers …

A new test structure was developed to measure three major unknown mechanical
parameters of deposited thin films, ie, fracture strength, Young's modulus, and residual …

This paper presents an analysis of the pull-in instability and vibrational behaviors for a multi-
layer microbeam actuated electrostatically. Based on the accurate geometrically nonlinear …

The residual strain of polycrystalline silicon (poly-Si) film is evaluated using the strain-
sensitive nature of the resonant frequency of a doubly-supported beam. By introducing the …

This paper presents a simple method for the in situ determination of Young's moduli of
surface-micromachined bilayer thin films. The test structure consists of a cantilever, a bottom …

An electromechanical model for a transducer based on a lateral resonating cantilever is
described. The on-plane vibrations of the cantilever are excited electrostatically by applying …

A novel digitally-actuated shaped micromirror for on-off optical switch applications is
described. Reflective static spherical mirrors were designed and fabricated using …

The deconvolution of the thermal and mechanical stress and other induced effects caused
by the electrical current flowing through a semiconductor-based device is often quite …