Piezoelectric MEMS resonators: A review
Since two decades piezoelectric MEMS resonator research has been making a headway by
leaps and bounds in multiple fronts such as micro/nanofabrication techniques, device and …
leaps and bounds in multiple fronts such as micro/nanofabrication techniques, device and …
A VHF temperature compensated lithium niobate-on-oxide resonator with Q> 3900 for low phase noise oscillators
This work reports a 40-MHz lithium niobate-on-oxide (LN/S1O2) micromechanical resonator
which simultaneously features a compensated temperature coefficient of frequency (TCf f of …
which simultaneously features a compensated temperature coefficient of frequency (TCf f of …
Piezoelectric-based support transducer design to enable high-performance bulk mode resonators
An innovative topology to realize high-performance bulk mode devices made up of low-
defect material by driving them into resonance using piezoelectric thin-film transduction is …
defect material by driving them into resonance using piezoelectric thin-film transduction is …
Microfabricated Aluminum Nitride MEMS Resonator
Y Zhang, T Feng, H Chen, Y Chai… - 2023 IEEE 18th …, 2023 - ieeexplore.ieee.org
In this paper, a piezoelectric MEMS resonator is presented working as laterally vibrating
resonator. The device is microfabricated with the SOI silicon wafer and piezoelectric …
resonator. The device is microfabricated with the SOI silicon wafer and piezoelectric …
Resonance Characteristics of Piezoelectric Resonator Based on Digital Driving Circuit of Field-Programmable Gate Array
Z Wang, X Wu, S Shu - Journal of Shanghai Jiaotong University (Science), 2019 - Springer
Piezoelectric resonators are widely used in frequency reference devices, mass sensors,
resonant sensors (such as gyros and accelerometers), etc. Piezoelectric resonators usually …
resonant sensors (such as gyros and accelerometers), etc. Piezoelectric resonators usually …