We develop a quantum photonic platform that interconnects a high-quality quantum dot
single-photon source and a low-loss photonic integrated circuit made in silicon nitride. The …

Optical techniques, such as optogenetic stimulation and functional fluorescence imaging,
have been revolutionary for neuroscience by enabling neural circuit analysis with cell-type …

This study demonstrates a monolithic 1 x 4 optical switch composed of a planar micro-
electro-mechanical system (MEMS) integrated with silicon nitride (SiN) waveguides. The …

Alignment is critical for efficient integration of photonic integrated circuits (PICs), and
microelectromechanical systems (MEMS) actuators have shown potential to tackle this …

This work demonstrates a hybrid MEMS actuator platform that combines electrostatic and
piezoelectric actuators to displace a suspended MEMS platform along 3 degrees-of-freedom …

Over the past three decades, silicon photonic devices have been core to the realization of
large‐scale photonic‐integrated circuits. However, silicon nitride is another key …

This article proposes an electrothermal three-degrees-of-freedom (3-DOF) micro-positioner
equipped with a waveguide path, which can potentially be used for chip-to-chip alignment in …

We present the first experimental demonstration of an inverse-designed 5mode division
multiplexer (MDM) in silicon nitride for MEMS-based inter-chip switches. The MDM exhibits …

The integration of active chips such as lasers and semiconductor optical amplifiers into
silicon photonics is essential in photonic integrated circuits. Silicon as the main platform in …

We demonstrate a microelectromechanical system (MEMS) based 1 x 5 optical switch with
integrated silicon nitride channel waveguides. Our MEMS actuator allows analog control for …