While flow line models have been studied for decades, excepting some cases with three
servers or less, their equilibrium probabilities remain elusive. As such, approximations …

Inspired by semiconductor manufacturing, this paper studies a system where the products
processed on multiple production machines are sampled to be measured on a single …

Since the beginning of the Crolles 300mm fab, more and more complex logic technologies,
down to 28nm node, have been developed. At the same time, the products mix increased at …

Motivated by the high investment and operational metrology cost, and subsequently the
limited metrology capacity, in modern semiconductor manufacturing facilities, we model and …

To control the quality of their processes, manufacturers perform measurement operations on
their products. In semiconductor manufacturing, measurement capacity is limited because …

In modern semiconductor manufacturing facilities, metrology capacity is becoming limited
because of the high equipment cost. This paper studies the problem of optimally assigning …

In-line quality control is a crucial and increasingly constraining activity, in particular in high
technology manufacturing. In this paper, we study a single metrology tool assigned to control …

Defectivity control in semiconductor manufacturing is crucial to improve the product quality
and to reduce the production cost. When defects are detected, the objective is to identify the …

Rapid Defect source tool identification in semiconductor manufacturing is crucial to improve
the product quality and to reduce the production cost. When defect is detected, tool …

When inspection economies are implemented in multi-product, multi-stage, parallel
processing manufacturing systems, there exists a significant risk of losing control of the …